Table of Contents

Clean Room Facilities

Overview

This facility is a controlled environment designed to maintain very low levels of particulates such as dust, airborne organisms, or vaporized particles.

The clean Room supports the processing of photolithography, microfluidics, micro-optic, and sensor devices as well as surface cleaning, bonding and etching throughout Oxygen plasma. Advanced processing capabilities include soft lithography techniques for patterning elastomeric materials.

Laboratory Floorplan

Equipment