cleanroom:direct_laser_lithography_system
Table of Contents
Dilase 250
Overview
The Dilase 250 is a direct laser photolithography equipment, designed to materialize relief patterns in photoresist by a photopolymerization process induced by a UV laser beam.
The software suite (Dilasesoft 250) is composed of four applications, which allow patterns design and creation (« KloeDesign »; « Dfl Creator »), and also to control the equipment and the automated writing of these patterns in a photosensitive material (« DilaseSoft 250 »; « Trajectory Tracking »). Depending on configuration, one Dilase 250 is equipped with ONE laser source (375nm or 405nm depending on model) and ONE optical treatment line (2μm laser spot at minimum).
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cleanroom/direct_laser_lithography_system.txt · Last modified: 2021/02/09 00:30 by giancarlo